Semiconductor materials and process technology handbook : for very large scale integration (VLSI) and ultra large scale integration (ULSI) /

A broad review of semiconductor materials and process technology, with emphasis on very large-scale integration (VLSI) and ultra large scale integration (ULSI). Brings together "snapshots" of the various aspects in different fields within the technology.

Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: McGuire, G. E.
Format: eBook
Language:English
Published: Park Ridge, N.J. : Noyes Publicatons, [1988]
Series:Materials science and process technology series.
Subjects:
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Call Number: TK7874 .S4178 1988eb
 
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TK7874 .S4178 1988eb Available