Handbook of contamination control in microelectronics : principles, applications, and technology /
Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across al...
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| Format: | eBook |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1988]
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| Series: | Materials science and process technology series.
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across all facets of semiconductor manufacturing. Clean room technology, well-recognized as a fundamental requirement in modern day circuit manufacturing, barely scratches the surface in total contamination control. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xxi, 488 pages) : illustrations. |
| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 1591240816 9781591240815 9780815511519 0815511515 |