Handbook of contamination control in microelectronics : principles, applications, and technology /

Covers the basics of contamination control for the beginner, while also focusing in depth on critical issues of process engineering and circuit manufacturing for the more advanced reader. Stresses to readers that what makes the area of contamination control unique is its ubiquitous nature, across al...

Full description

Bibliographic Details

Corporate Author:	Knovel (Firm)
Other Authors:	Tolliver, Donald L.
Format:	eBook
Language:	English
Published:	Park Ridge, N.J., U.S.A. : Noyes Publications, [1988]
Series:	Materials science and process technology series.
Subjects:	Integrated circuits > Design and construction. Contamination (Technology) Electronic books.
Online Access:	Connect to the full text of this electronic book