Handbook of semiconductor wafer cleaning technology : science, technology, and applications /

Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.

Bibliographic Details
Corporate Author: Knovel (Firm)
Other Authors: Kern, Werner, 1925-
Format: eBook
Language:English
Published: Park Ridge, N.J., U.S.A. : Noyes Publications, [1993]
Series:Materials science and process technology series. Electronic materials and process technology.
Subjects:
Online Access:Connect to the full text of this electronic book
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Published 1993
Book