Handbook of semiconductor wafer cleaning technology : science, technology, and applications /

Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.

Bibliographic Details

Corporate Author:	Knovel (Firm)
Other Authors:	Kern, Werner, 1925-
Format:	eBook
Language:	English
Published:	Park Ridge, N.J., U.S.A. : Noyes Publications, [1993]
Series:	Materials science and process technology series. Electronic materials and process technology.
Subjects:	Semiconductor wafers > Cleaning. Semicondutores. Electronic books.
Online Access:	Connect to the full text of this electronic book