Handbook of semiconductor wafer cleaning technology : science, technology, and applications /
Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field.
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| Format: | eBook |
| Language: | English |
| Published: |
Park Ridge, N.J., U.S.A. :
Noyes Publications,
[1993]
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| Series: | Materials science and process technology series. Electronic materials and process technology.
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | Discusses semiconductor wafer cleaning and the scientific and technical disciplines associated directly or indirectly with this subject. Intended to serve as a handbook for practitioners and professionals in the field. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xx, 623 pages) : illustrations. |
| Format: | Master and use copy. Digital master created according to Benchmark for Faithful Digital Reproductions of Monographs and Serials, Version 1. Digital Library Federation, December 2002. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 159124093X 9781591240938 9780815513315 0815513313 |