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A novel vacuum packaging design process for microelectromechanical system (MEMS) quad-mass gyroscopes /

Bibliographic Details
Main Authors: Deshmukh, Rohan (Author), Knight, Ryan (Author), Nothwang, William (Author)
Format: Government Document eBook
Language:English
Published: Adelphi, MD : US Army Research Laboratory, 2016.
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 7825.
Subjects:
Gyroscopes.
Hermetic sealing.
Online Access:https://purl.fdlp.gov/GPO/gpo74856
http://purl.fdlp.gov/GPO/gpo74856
Description
Item Description:"Sep 2016."
Physical Description:1 online resource (vi, 38 pages) : color illustrations.
Bibliography:Includes bibliographical references (pages 34-35).