A novel vacuum packaging design process for microelectromechanical system (MEMS) quad-mass gyroscopes /

Bibliographic Details

Main Authors:	Deshmukh, Rohan (Author), Knight, Ryan (Author), Nothwang, William (Author)
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : US Army Research Laboratory, 2016.
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 7825.
Subjects:	Gyroscopes. Hermetic sealing.
Online Access:	https://purl.fdlp.gov/GPO/gpo74856 http://purl.fdlp.gov/GPO/gpo74856