Resolution enhancement techniques in optical lithography /
Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolutio...
| Main Author: | |
|---|---|
| Corporate Author: | |
| Format: | eBook |
| Language: | English |
| Published: |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2001.
|
| Series: | SPIE tutorial texts ;
TT47. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
Search Result 1
