Resolution enhancement techniques in optical lithography /

Ever-smaller IC devices are pushing the optical lithography envelope, increasing the importance of resolution enhancement techniques. This tutorial encompasses two decades of research. It discusses theoretical and practical aspects of commonly used techniques, including optical imaging and resolutio...

Full description

Bibliographic Details

Main Author:	Wong, Alfred Kwok-Kit
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Format:	eBook
Language:	English
Published:	Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2001.
Series:	SPIE tutorial texts ; TT47.
Subjects:	Integrated circuits > Design and construction. Microlithography. Electronic books.
Online Access:	Connect to the full text of this electronic book