Lithography process control /
This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process...
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| Format: | eBook |
| Language: | English |
| Published: |
Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
[1999]
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| Series: | SPIE tutorial texts ;
TT28. |
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process control as background for advanced topics such as complex processes and feedback. In addition, it presents control methodologies that may be applied to process development pilot lines. |
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| Item Description: | "SPIE digital library." Electronic resource. |
| Physical Description: | 1 online resource (x, 190 pages) : illustrations. Also available in print version. |
| Format: | Mode of access: World Wide Web. System requirements: Adobe Acrobat Reader. |
| Bibliography: | Includes bibliographical references (pages 169-188) and index. |
| ISBN: | 9780819478559 (electronic) |
| DOI: | 10.1117/3.322162 |
| Access: | Restricted to subscribers or individual electronic text purchasers. |