Lithography process control /

This text covers lithography process control at several levels, from fundamental through advanced topics. The book is a self-contained tutorial that works both as an introduction to the technology and as a reference for the experienced lithographer. It reviews the foundations of statistical process...

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Bibliographic Details

Main Author:	Levinson, Harry J.
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Format:	eBook
Language:	English
Published:	Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, [1999]
Series:	SPIE tutorial texts ; TT28.
Subjects:	Microlithography > Quality control. Semiconductors > Etching. Electronic books.
Online Access:	Connect to the full text of this electronic book