APA (7th ed.) Citation

Levinson, H. J. (2005). Principles of lithography (2nd ed.). SPIE. https://doi.org/10.1117/3.601520

Chicago Style (17th ed.) Citation

Levinson, Harry J. Principles of Lithography. 2nd ed. Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA): SPIE, 2005. https://doi.org/10.1117/3.601520.

MLA (9th ed.) Citation

Levinson, Harry J. Principles of Lithography. 2nd ed. SPIE, 2005. https://doi.org/10.1117/3.601520.