Principles of lithography /

Lithography is a field in which advances proceed at a swift pace. This book was written to address several needs, and the revisions for the second edition were made with those original objectives in mind. Many new topics have been included in this text commensurate with the progress that has taken p...

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Bibliographic Details

Main Author:	Levinson, Harry J.
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Format:	eBook
Language:	English
Published:	Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2005.
Edition:	2nd ed.
Series:	SPIE monograph ; PM146.
Subjects:	Integrated circuits > Design and construction. Microlithography. Electronic books.
Online Access:	Connect to the full text of this electronic book