Field guide to optical lithography /

The material in this Field Guide is a distillation of material put together by Chris Mack over the past 20 years, including notes from his graduate-level lithography course at the University of Texas at Austin. This Field Guide details the lithography process, image formation, imaging onto a photore...

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Bibliographic Details

Main Author:	Mack, Chris A.
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Format:	eBook
Language:	English
Published:	Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2006.
Series:	SPIE field guides ; FG06.
Subjects:	Integrated circuits > Design and construction. Microlithography. Electronic books.
Online Access:	Connect to the full text of this electronic book