3D IC devices, technologies, and manufacturing /
This book discusses the advantages of 3D devices and their applications in dynamic random access memory (DRAM), 3D-NAND flash, and advanced-technology-node CMOS ICs. Topics include the development of DRAM cell transistors and storage node capacitors; the manufacturing process of advanced buried-word...
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| Format: | eBook |
| Language: | English |
| Published: |
Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2016.
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| Series: | SPIE Digital Library.
SPIE monograph ; PM265. |
| Subjects: | |
| Online Access: | Connect to the full text of this electronic book |
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