Design technology co-optimization in the era of sub-resolution IC scaling /

Tackle the challenges facing the most advanced technology nodes in the microelectronics industry with the help of design technology co-optimization (DTCO). This mediation process aims to ensure competitive technology architecture definition while avoiding schedule or yield risks caused by unrealisti...

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Bibliographic Details

Main Authors:	Liebmann, Lars W. (Author), Pileggi, Lawrence, 1962- (Author), Vaidyanathan, Kaushik (Author)
Format:	eBook
Language:	English
Published:	Bellingham, Washington : SPIE, [2015]
Series:	SPIE Digital Library. Tutorial texts in optical engineering ; v. TT 104.
Subjects:	Integrated circuits > Design and construction. Lithography, Electron beam. Electronic books.
Online Access:	Connect to the full text of this electronic book