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Molecular theory of lithography /

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This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithograph...

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Bibliographic Details
Main Author: Okoroanyanwu, Uzodinma (Author)
Format: eBook
Language:English
Published: Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2015.
Series:SPIE Digital Library.
SPIE monograph ; PM255.
Subjects:
Integrated circuits > Masks.
Microlithography > Industrial applications.
Molecular electronics.
Molecular theory.
Electronic books.
Online Access:Connect to the full text of this electronic book
Table of Contents:
  • Preface
  • Acronyms and abbreviations
  • 1. Overview of lithography
  • 2. Theory of the lithographic process
  • 3. Theory of molecular interactions in lithography
  • 4. Theory of photochemical and radiochemical lithographic imaging mechanisms
  • 5. Theory of block copolymer self-assembly lithographic imaging mechanisms
  • 6. Theory of imprint lithographic imaging mechanisms
  • Index.