Molecular theory of lithography /

This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithograph...

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Bibliographic Details

Main Author:	Okoroanyanwu, Uzodinma (Author)
Format:	eBook
Language:	English
Published:	Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2015.
Series:	SPIE Digital Library. SPIE monograph ; PM255.
Subjects:	Integrated circuits > Masks. Microlithography > Industrial applications. Molecular electronics. Molecular theory. Electronic books.
Online Access:	Connect to the full text of this electronic book