Molecular theory of lithography /
This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithograph...
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| Format: | eBook |
| Language: | English |
| Published: |
Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) :
SPIE,
2015.
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| Series: | SPIE Digital Library.
SPIE monograph ; PM255. |
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithographic process, as well as for advanced lithographic imaging mechanisms, including photochemical and radiochemical, imprint, and directed block copolymer self-assembly imaging mechanisms. The book is intended for student and professionals whose knowledge of lithography extends to the chemistry and physics underlying its various forms. A familiarity with chemical kinetics, thermodynamics, statistical mechanics, and quantum mechanics will be helpful, as will be familiarity with elementary concepts in physics such as energy, force, electrostatics, electrodynamics, and optics. |
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| Item Description: | "SPIE Digital Library."--Website. |
| Physical Description: | 1 online resource (xix, 469 pages). Also available in print version. |
| Format: | Mode of access: World Wide Web. System requirements: Adobe Acrobat Reader. |
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781628415520 |
| DOI: | 10.1117/3.2179925 |
| Access: | Restricted to subscribers or individual electronic text purchasers. |