APA (7th ed.) Citation

Okoroanyanwu, U. (2015). Molecular theory of lithography. SPIE. https://doi.org/10.1117/3.2179925

Chicago Style (17th ed.) Citation

Okoroanyanwu, Uzodinma. Molecular Theory of Lithography. Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA): SPIE, 2015. https://doi.org/10.1117/3.2179925.

MLA (9th ed.) Citation

Okoroanyanwu, Uzodinma. Molecular Theory of Lithography. SPIE, 2015. https://doi.org/10.1117/3.2179925.