Introduction to metrology applications in IC manufacturing /

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial T...

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Bibliographic Details

Main Authors:	Bo, Su (Author), Solecky, Eric (Author), Vaid, Alok (Author)
Format:	eBook
Language:	English
Published:	Bellingham, Washington (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2015.
Series:	SPIE Digital Library. Tutorial texts in optical engineering ; v. TT 101.
Subjects:	Integrated circuits > Design and construction. Integrated circuits > Measurement. Electronic books.
Online Access:	Connect to the full text of this electronic book