Optical scattering : measurement and analysis /

The first edition of this book concentrated on relating scatter from optically smooth surfaces to the microroughness on those surfaces. After spending six years in the semiconductor industry, Dr. Stover has updated and expanded the third edition. Newly included are scatter models for pits and partic...

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Bibliographic Details
Main Author: Stover, John C.
Corporate Author: Society of Photo-optical Instrumentation Engineers
Format: eBook
Language:English
Published: Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2012.
Edition:3rd ed.
Series:SPIE Digital Library.
SPIE monograph ; PM224.
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Call Number: QC427.4 .S76 2012e
 
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QC427.4 .S76 2012e Available