Introduction to semiconductor technology /

Integrated circuit fabrication is a complex process, and engineers must have a deep understanding of the intricate technolgies involved in order to be successful. This book, intended for technical and college students, provides an overview of key concepts, equipment, and techniques used in fabs toda...

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Bibliographic Details

Main Author:	Xiao, Hong
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Format:	eBook
Language:	English
Published:	Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2012.
Edition:	2nd ed.
Series:	SPIE Digital Library. SPIE monograph ; PM220.
Subjects:	Integrated circuits > Design and construction. Semiconductor industry. Semiconductors > Design and construction. Electronic books.
Online Access:	Connect to the full text of this electronic book