Chemistry and lithography /

This book provides a comprehensive treatment of the chemical phenomena in lithography in a manner that is accessible to a general readership. The book presents topics on the optical and charged particle physics practiced in lithography, with a broader view of how the marriage between chemistry and o...

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Bibliographic Details

Main Author:	Okoroanyanwu, Uzodinma
Corporate Author:	Society of Photo-optical Instrumentation Engineers
Format:	eBook
Language:	English
Published:	Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, 2010.
Series:	SPIE Digital Library. SPIE monograph ; PM192.
Subjects:	Chemistry, Technical. Lithography. Electronic books.
Online Access:	Connect to the full text of this electronic book