EUV lithography /

Dr. Bakshi has compiled a thorough, clear reference text covering the important fields of EUV lithography for high-volume manufacturing. This book has resulted from his many years of experience in EUVL development and from teaching this subject to future specialists. The book proceeds from an histor...

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Bibliographic Details

Corporate Author:	Society of Photo-optical Instrumentation Engineers
Other Authors:	Bakshi, Vivek
Format:	eBook
Language:	English
Published:	Bellingham, Wash. (1000 20th St. Bellingham WA 98225-6705 USA) : SPIE, [2009]
Series:	SPIE monograph ; PM178.
Subjects:	Optical coatings. Photolithography. Ultraviolet radiation > Industrial applications. Electronic books.
Online Access:	Connect to the full text of this electronic book