Nanometer-scale defect detection using polarized light /
| Main Author: | |
|---|---|
| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
London : Hoboken, N.J. :
ISTE ; John Wiley & Sons,
2016.
|
| Series: | Reliability of multiphysical systems ;
2. |
| Subjects: |
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