Nanometer-scale defect detection using polarized light /
| Main Author: | |
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| Other Authors: | , |
| Format: | Book |
| Language: | English |
| Published: |
London : Hoboken, N.J. :
ISTE ; John Wiley & Sons,
2016.
|
| Series: | Reliability of multiphysical systems ;
2. |
| Subjects: |
| Physical Description: | xiv, 296 pages : illustrations ; 25 cm. |
|---|---|
| Bibliography: | Includes bibliographical references and index. |
| ISBN: | 9781848219366 1848219369 |