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Molecular theory of lithography /

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This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithograph...

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Bibliographic Details
Main Author: Okoroanyanwu, Uzodinma (Author)
Format: Book
Language:English
Published: Bellingham, Washington, USA : SPIE Press, [2015]
Subjects:
Microlithography > Industrial applications.
Molecular theory.
Molecular electronics.
Integrated circuits > Masks.
Table of Contents:
  • Preface
  • Acronyms and abbreviations
  • Overview of lithography
  • Theory of the lithographic process
  • Theory of molecular interactions in lithography
  • Theory of photochemical and radiochemical lithographic imaging mechanisms
  • Theory of block copolymer self-assembly lithographic imaging mechanisms
  • Theory of imprint lithographic imaging mechanisms.