Molecular theory of lithography /
This book is a unified exposition of the molecular theory that underlies lithographic imaging. It explains with physical-chemical theories the molecular-level interactions involved in lithographic imaging. It also provides the theoretical basis for the main unit operations of the advanced lithograph...
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Bibliographic Details
| Main Author: |
Okoroanyanwu, Uzodinma
(Author) |
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| Format: | Book
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| Language: | English |
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| Published: |
Bellingham, Washington, USA :
SPIE Press,
[2015]
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| Subjects: | |
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