Introduction to metrology applications in IC manufacturing /

Metrology has grown significantly, especially in semiconductor manufacturing, and such growth necessitates increased expertise. Until now, this field has never had book written from the perspective of an engineer in a modern IC manufacturing and development environment. The topics in this Tutorial T...

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Bibliographic Details

Main Authors:	Su, Bo, 1961- (Author), Solecky, Eric (Author), Vaid, Alok (Author)
Format:	Book
Language:	English
Published:	Bellingham, Washington : SPIE, [2015]
Series:	Tutorial texts in optical engineering ; v. TT 101.
Subjects:	Integrated circuits > Measurement. Integrated circuits > Design and construction.