Cover Image

Design and fabrication of a strain-powered microelectromechanical system (MEMS) switch /

Bibliographic Details
Main Authors: Knick, Cory R. (Author), Morris, Christopher J. (Author)
Format: Government Document eBook
Language:English
Published: Adelphi, MD : Army Research Laboratory, September 2014.
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 7095.
Subjects:
Microelectromechanical systems.
Microfabrication.
Online Access:https://purl.fdlp.gov/GPO/gpo61247
http://purl.fdlp.gov/GPO/gpo61247
Description
Item Description:Title from title screen (viewed Sept. 30, 2015).
"September 2014."
Physical Description:1 online resource (v, 25 pages) : color illustrations.
Bibliography:Includes bibliographical references (pages 14-15).