Design and fabrication of a strain-powered microelectromechanical system (MEMS) switch /

Bibliographic Details

Main Authors:	Knick, Cory R. (Author), Morris, Christopher J. (Author)
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, September 2014.
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 7095.
Subjects:	Microelectromechanical systems. Microfabrication.
Online Access:	https://purl.fdlp.gov/GPO/gpo61247 http://purl.fdlp.gov/GPO/gpo61247