Cover Image

Hermetic encapsulation of nanoenergetic porous silicon wafer by parylene /

Bibliographic Details
Main Author: Zakar, Eugene (Author)
Format: Government Document eBook
Language:English
Published: Adelphi, MD : Army Research Laboratory, August 2014.
Series:ARL-TR (Aberdeen Proving Ground, Md.) ; 7025.
Subjects:
Microencapsulation.
Silicon polymers.
Integrated circuits.
Online Access:https://purl.fdlp.gov/GPO/gpo61230
http://purl.fdlp.gov/GPO/gpo61230
Description
Item Description:Title from title screen (viewed Sept. 29, 2015).
"August 2014."
Physical Description:1 online resource (iv, 12 pages) : color illustrations.
Bibliography:Includes bibliographical references (page 11).