Hermetic encapsulation of nanoenergetic porous silicon wafer by parylene /

Bibliographic Details

Main Author:	Zakar, Eugene (Author)
Format:	Government Document eBook
Language:	English
Published:	Adelphi, MD : Army Research Laboratory, August 2014.
Series:	ARL-TR (Aberdeen Proving Ground, Md.) ; 7025.
Subjects:	Microencapsulation. Silicon polymers. Integrated circuits.
Online Access:	https://purl.fdlp.gov/GPO/gpo61230 http://purl.fdlp.gov/GPO/gpo61230