Atomic oxygen energy in low frequency hyperthermal plasma ashers /
| Main Authors: | Banks, Bruce A. (Author), Kneubel, Christian A. (Author), Miller, Sharon K. (Author) |
|---|---|
| Format: | Government Document eBook |
| Language: | English |
| Published: |
Cleveland, Ohio :
National Aeronautics and Space Administration, Glenn Research Center,
November 2014.
|
| Series: | NASA technical memorandum ;
2014-218412. |
| Subjects: | |
| Online Access: | https://purl.fdlp.gov/GPO/gpo57984 http://purl.fdlp.gov/GPO/gpo57984 |
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