Atomic oxygen energy in low frequency hyperthermal plasma ashers /

Bibliographic Details
Main Authors: Banks, Bruce A. (Author), Kneubel, Christian A. (Author), Miller, Sharon K. (Author)
Format: Government Document eBook
Language:English
Published: Cleveland, Ohio : National Aeronautics and Space Administration, Glenn Research Center, November 2014.
Series:NASA technical memorandum ; 2014-218412.
Subjects:
Online Access:https://purl.fdlp.gov/GPO/gpo57984
http://purl.fdlp.gov/GPO/gpo57984

Internet

https://purl.fdlp.gov/GPO/gpo57984
http://purl.fdlp.gov/GPO/gpo57984

Available Online

Holdings details from Available Online
Call Number: NAS 1.15:2014-218412
 
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NAS 1.15:2014-218412 Available