Atomic oxygen energy in low frequency hyperthermal plasma ashers /

Bibliographic Details
Main Authors: Banks, Bruce A. (Author), Kneubel, Christian A. (Author), Miller, Sharon K. (Author)
Format: Government Document eBook
Language:English
Published: Cleveland, Ohio : National Aeronautics and Space Administration, Glenn Research Center, November 2014.
Series:NASA technical memorandum ; 2014-218412.
Subjects:
Online Access:https://purl.fdlp.gov/GPO/gpo57984
http://purl.fdlp.gov/GPO/gpo57984
Description
Item Description:Title from title screen (viewed on June 3, 2015).
"November 2014."
Physical Description:1 online resource (10 pages) : color illustrations.
Bibliography:Includes bibliographical references (page 10).