Atomic oxygen energy in low frequency hyperthermal plasma ashers /
| Main Authors: | , , |
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| Format: | Government Document eBook |
| Language: | English |
| Published: |
Cleveland, Ohio :
National Aeronautics and Space Administration, Glenn Research Center,
November 2014.
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| Series: | NASA technical memorandum ;
2014-218412. |
| Subjects: | |
| Online Access: | https://purl.fdlp.gov/GPO/gpo57984 http://purl.fdlp.gov/GPO/gpo57984 |
| Item Description: | Title from title screen (viewed on June 3, 2015). "November 2014." |
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| Physical Description: | 1 online resource (10 pages) : color illustrations. |
| Bibliography: | Includes bibliographical references (page 10). |