Low Dielectric Constant Materials for IC Applications /

Low dielectric constant materials are an important component of microelectronic devices. This comprehensive book covers the latest low-dielectric-constant (low-k) materials technology, thin film materials characterization, integration and reliability for back-end interconnects and packaging applicat...

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Bibliographic Details

Main Author:	Ho, P. S.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Leu, Jihperng Jim, Lee, Wei William
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 2003.
Series:	Springer series in advanced microelectronics ; 9.
Subjects:	Electronics. Optical materials. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book