Molecular Beam Epitaxy : Fundamentals and Current Status /
Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. This monograph discusses the most important aspects of an MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the char...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
1996.
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| Edition: | Second, rev. and Updated edition. |
| Series: | Springer series in materials science ;
7. |
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| Online Access: | Connect to the full text of this electronic book |
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