Molecular Beam Epitaxy : Fundamentals and Current Status /

Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. This monograph discusses the most important aspects of an MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the char...

Full description

Bibliographic Details

Main Author:	Herman, Marian A.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Sitter, Helmut
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 1996.
Edition:	Second, rev. and Updated edition.
Series:	Springer series in materials science ; 7.
Subjects:	Chemistry, Inorganic. Electronics. Optical materials. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book