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Molecular Beam Epitaxy : Fundamentals and Current Status /

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Molecular Beam Epitaxy describes a technique in wide-spread use for the production of high-quality semiconductor devices. This monograph discusses the most important aspects of an MBE apparatus, the physics and chemistry of the crystallization of various materials and device structures, and the char...

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Bibliographic Details
Main Author: Herman, Marian A.
Corporate Author: SpringerLink (Online service)
Other Authors: Sitter, Helmut
Format: eBook
Language:English
Published: Berlin, Heidelberg : Springer Berlin Heidelberg, 1996.
Edition:Second, rev. and Updated edition.
Series:Springer series in materials science ; 7.
Subjects:
Chemistry, Inorganic.
Electronics.
Optical materials.
Surfaces (Physics)
Electronic books.
Online Access:Connect to the full text of this electronic book

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