Microsystem Technology and Microrobotics /

Microsystem technology (MST) integrates very small (up to a few nanometers) mechanical, electronic, optical, and other components on a substrate to construct functional devices. These devices are used as intelligent sensors, actuators, and controllers for medical, automotive, household and many othe...

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Bibliographic Details

Main Author:	Fatikow, S. (Sergej), 1960-
Corporate Author:	SpringerLink (Online service)
Other Authors:	Rembold, Ulrich
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 1997.
Subjects:	Computer science. Artificial intelligence. Physics. Engineering. Electronics. Electronic books.
Online Access:	Connect to the full text of this electronic book