Johnstone, R. W., & Parameswaran, A. M. (2004). An Introduction to Surface-Micromachining. Springer US.
Chicago Style (17th ed.) CitationJohnstone, Robert W., and Ash M. Parameswaran. An Introduction to Surface-Micromachining. Boston, MA: Springer US, 2004.
MLA (9th ed.) CitationJohnstone, Robert W., and Ash M. Parameswaran. An Introduction to Surface-Micromachining. Springer US, 2004.
Warning: These citations may not always be 100% accurate.