APA (7th ed.) Citation

Johnstone, R. W., & Parameswaran, A. M. (2004). An Introduction to Surface-Micromachining. Springer US.

Chicago Style (17th ed.) Citation

Johnstone, Robert W., and Ash M. Parameswaran. An Introduction to Surface-Micromachining. Boston, MA: Springer US, 2004.

MLA (9th ed.) Citation

Johnstone, Robert W., and Ash M. Parameswaran. An Introduction to Surface-Micromachining. Springer US, 2004.

Warning: These citations may not always be 100% accurate.