An Introduction to Surface-Micromachining /

An Introduction to Surface-Micromachining provides for the first time a unified view of surface-micromachining. Building up from the basic building block of microfabrication techniques, to the general surface-micromachining design, it will finish with the theory and design of concrete components. An...

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Bibliographic Details

Main Author:	Johnstone, Robert W.
Corporate Author:	SpringerLink (Online service)
Other Authors:	Parameswaran, Ash M.
Format:	eBook
Language:	English
Published:	Boston, MA : Springer US, 2004.
Subjects:	Engineering. Mechanical engineering. Computer engineering. Systems engineering. Electronic books.
Online Access:	Connect to the full text of this electronic book