APA (7th ed.) Citation

Chabal, Y. J. (2001). Fundamental Aspects of Silicon Oxidation. Springer Berlin Heidelberg.

Chicago Style (17th ed.) Citation

Chabal, Yves J. Fundamental Aspects of Silicon Oxidation. Berlin, Heidelberg: Springer Berlin Heidelberg, 2001.

MLA (9th ed.) Citation

Chabal, Yves J. Fundamental Aspects of Silicon Oxidation. Springer Berlin Heidelberg, 2001.