Simulation of Semiconductor Processes and Devices 1998 : SISPAD 98 /

This volume contains the proceedings of the 1998 International Conference on Simulation of Semiconductor Processes and Devices and provides an open forum for the presentation of the latest results and trends in modeling and simulation of semiconductor equipment, processes and devices. Topics include...

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Bibliographic Details

Main Author:	Meyer, Kristin
Corporate Author:	SpringerLink (Online service)
Other Authors:	Biesemans, Serge
Format:	eBook
Language:	English
Published:	Vienna : Springer Vienna, 1998.
Subjects:	Engineering. Computer simulation. Physics. Electronics. Optical materials. Electronic books.
Online Access:	Connect to the full text of this electronic book