Predictive Simulation of Semiconductor Processing : Status and Challenges /
Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion,...
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| Format: | eBook |
| Language: | English |
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Berlin, Heidelberg :
Springer Berlin Heidelberg,
2004.
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| Series: | Springer series in materials science ;
72. |
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| Online Access: | Connect to the full text of this electronic book |
Table of Contents:
- Transistors and Atoms
- Atomistic Simulations of Processes at Surfaces
- Atomistic Simulations in Materials Processing
- Atomistic Simulation of Decanano MOSFETs
- Modeling and Simulation of Heterojunction Bipolar Transistors
- Gate Oxide Reliability: Physical and Computational Models
- High-K Dielectrics: The Example of Pr2O3
- Atomistic Simulation of Si3N4 CVD from Dichlorosilane and NH3
- Interconnects and Propagation of High Frequency Signals
- Modeling of Electromigration in Interconnects
- Predictive Modeling of Transition Metal Gathering: Applications and Materials Science Challenges.