Predictive Simulation of Semiconductor Processing : Status and Challenges /

Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion,...

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Bibliographic Details

Main Author:	Dabrowski, Jarek
Corporate Author:	SpringerLink (Online service)
Other Authors:	Weber, Eicke R.
Format:	eBook
Language:	English
Published:	Berlin, Heidelberg : Springer Berlin Heidelberg, 2004.
Series:	Springer series in materials science ; 72.
Subjects:	Mathematical physics. Engineering. Structural control (Engineering) Nanotechnology. Surfaces (Physics) Electronic books.
Online Access:	Connect to the full text of this electronic book