Predictive Simulation of Semiconductor Processing : Status and Challenges /
Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion,...
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| Format: | eBook |
| Language: | English |
| Published: |
Berlin, Heidelberg :
Springer Berlin Heidelberg,
2004.
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| Series: | Springer series in materials science ;
72. |
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| Online Access: | Connect to the full text of this electronic book |
| Summary: | Predictive simulation of semiconductor processing enables researchers and developers to extend the scaling range of semiconductor devices beyond the parameter range of empirical research. It requires a thorough understanding of the basic mechanisms employed in device fabrication, such as diffusion, ion implantation, epitaxy, defect formation and annealing, and contamination. This book presents an in-depth discussion of our current understanding of key processes and identifies areas that require further work in order to achieve the goal of a comprehensive, predictive process simulation tool. |
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| Item Description: | Electronic resource. |
| Physical Description: | 1 online resource (xvii, 490 pages) |
| ISBN: | 9783662094327 (electronic bk.) 3662094320 (electronic bk.) |
| ISSN: | 0933-033X ; |